Nanolithography

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  • Published date: January 13, 2021
    • United States
Nanolithography
Nanolithography

In the fabrication of transistors, organic light emitting diodes (OLEDs), and energy storage devices, there has been a high demand for the thin film layers to be patterned, etched and coated. Lithography combines those processes and can create millions of devices in batch. During the past decades many nanolithography techniques have been developed to write micro- and nanostructures on a wide variety of materials.
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